A Study on MPCVD of Thick Diamond Film on TWT Rod to Improve the Heat Dissipation

XIE Kuo-jun

您当前的位置：

首页 >

文章列表页 >

A Study on MPCVD of Thick Diamond Film on TWT Rod to Improve the Heat Dissipation

更新时间：2025-07-16

- A Study on MPCVD of Thick Diamond Film on TWT Rod to Improve the Heat Dissipation
- Acta Electronica Sinica Vol. 28, Issue 9, Pages: 85-87(2000)
- 作者机构：
  
  1. 电子科技大学,成都,610054
  2. 电子科技大学成都,610054
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN124.2TN304.18O484.1
- Published：2000
- 稿件说明：
移动端阅览
XIE Kuo-jun. A Study on MPCVD of Thick Diamond Film on TWT Rod to Improve the Heat Dissipation[J]. Acta Electronica Sinica, 2000, 28(9): 85-87.
DOI：

XIE Kuo-jun. A Study on MPCVD of Thick Diamond Film on TWT Rod to Improve the Heat Dissipation[J]. Acta Electronica Sinica, 2000, 28(9): 85-87. DOI：

摘要

采用微波等离子体化学气相沉积法在行波管Al

夹持杆上沉积金刚石厚膜

取代传统有毒的氧化铍陶瓷杆

用于宽带大功率行波管改善其散热性能.经材料性能测试

慢波组件装配及性能测试

获得了较好的实验结果:导热率大于12W/cm.℃

介电常数为5.0~5.5

介质损耗为1×10

-3

体积电阻率大于10

Ω/cm; 慢波组件导热性能与同结构的BeO组件相比提高3.0倍.整管冷测参数全部合格;整管热测在C波段测得

=95W

=35db.

Abstract

Thick diamond films were synthesized on Al

rod using a microwave plasma chemical vapor deposition technique

which can be taken over the traditional BeO rod and used in the wide-band high power TWT to improve the heat dissipation greatly.After material tests and evaluation

parts assembly and tests

we've got the first good results as follows:Thermal conductivity:＞12 W/cm.℃

ten times better than BeO Rod;dielectric constant:ε=5.0~5.5;RF loss:tanδ＜1×10

-3;resistivity:ρ＞10

１3

Ω/cm;slow wave parts assembly thermal test:3.0 times better than BeO.The first TWT with diamond rods has passed all cold tests and has got following hot test results:Δf=4~8GHz

Pout=95W

G=35db.

关键词

Keywords

references

Views

987

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Key Issue and Research Challenges of Wide Bandgap Semiconductor Detectors for Fusion Neutron Detection

Study of Heat Dissipation of Slow-wave Structure Made by Different Technology

Design and Three-Dimensional Beam/Circuit Interaction Simulation of W-Band Folded Waveguide SWS

Computer Simulation of Focusing Performance of PPM’sFocusing System in Direct Current State

Related Author

SU Kai

ZHANG Jin-feng

ZHANG Yi-yun

JIANG Shu-qing

GUO Hui

ZHANG Jin-cheng

HAO Yue

ZHANG Jin-feng

Related Institution

State Key Laboratory of Wide Band-gap Semiconductor Devices and Integrated Technology, Faculty of Integrated Circuit, Xidian University

National Engineering Research Center of Wide Band-gap Semiconductor, Xidian University

Institute of Semiconductors, Chinese Academy of Sciences

Institute of Nuclear Physics and Chemistry, China Academy of Engineering Physics

State Key Laboratory of Wide-Bandgap Semiconductor Devices and Integrated Technology， School of Microelectronics， Xidian University

⁰