Analysis of the Characteristic Impedance of Micromachined Microwave Transmission Lines with FEM

SHI Yan-ling; YU Dan-dan; DONG Xing-qi; LAI Zong-sheng

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Analysis of the Characteristic Impedance of Micromachined Microwave Transmission Lines with FEM

更新时间：2025-07-16

- Analysis of the Characteristic Impedance of Micromachined Microwave Transmission Lines with FEM
- Acta Electronica Sinica Vol. 28, Issue 12, Pages: 113-115(2000)
- 作者机构：
  
  华东师范大学电子科学技术系,上海,200062
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN62
- Published：2000
- 稿件说明：
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SHI Yan-ling, YU Dan-dan, DONG Xing-qi, et al. Analysis of the Characteristic Impedance of Micromachined Microwave Transmission Lines with FEM[J]. Acta Electronica Sinica, 2000, 28(12): 113-115.
DOI：

SHI Yan-ling, YU Dan-dan, DONG Xing-qi, et al. Analysis of the Characteristic Impedance of Micromachined Microwave Transmission Lines with FEM[J]. Acta Electronica Sinica, 2000, 28(12): 113-115. DOI：

摘要

本文在相似剖分有限元法的基础上

结合微机械微波共平面波导的结构特点

提出了混合相似剖分有限元技术并应用于微机械微波共平面波导特性阻抗的数值计算

分析了其特性阻抗及其随参数的变化

并给出常用35Ω、50Ω、75Ω、120Ω波导的具体设计尺寸.

Abstract

A new similarity method in FEM is presented for researching of the problems about the nonuniform and irregular region

such as micromachined microwave coplanar waveguide

which can be fabricated through a commercial CMOS process.By using this new method

we calculate the characteristic impedance of this kind of suspended waveguide and analyze the change with its dimensions.From the result

we summarize the different structures with characteristic impedance of 35Ω、50Ω、75Ω、120Ω.

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