Probe Diagnosis of Electron Temperature and Electron Energy Distribution in Dielectric Barrier Silent Discharge

LING Yi-ming; XU Jian-jun

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Probe Diagnosis of Electron Temperature and Electron Energy Distribution in Dielectric Barrier Silent Discharge

更新时间：2025-07-16

- Probe Diagnosis of Electron Temperature and Electron Energy Distribution in Dielectric Barrier Silent Discharge
- Acta Electronica Sinica Vol. 29, Issue 2, Pages: 218-221(2001)
- 作者机构：
  
  东南大学电子工程系,南京,210018
- 作者简介：
- 基金信息：
- DOI：
  CLC： O461
- Published：2001
- 稿件说明：
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LING Yi-ming, XU Jian-jun. Probe Diagnosis of Electron Temperature and Electron Energy Distribution in Dielectric Barrier Silent Discharge[J]. Acta Electronica Sinica, 2001, 29(2): 218-221.
DOI：

LING Yi-ming, XU Jian-jun. Probe Diagnosis of Electron Temperature and Electron Energy Distribution in Dielectric Barrier Silent Discharge[J]. Acta Electronica Sinica, 2001, 29(2): 218-221. DOI：

摘要

用对称双探极和非对称双探极分别诊断氖气中介质阻挡无声放电的电子温度和电子能量分布.本文概述其诊断技术的原理、装置和实验结果

并分析讨论了实验结果.实验表明

这种放电的电子温度随着气压的增加而减少

并明显高于相应气压下的直流放电电子温度

而且

其电子能量分布明显偏离Maxwellian能量分布.

Abstract

The symmetrical and asymmetrical double probes have been used to diagnose the electron temperature and the electron energy distribution in the dielectric barrier discharge

respectively.In this paper

the principle and setup of the diagnosis are described briefly

and the experimental results are discussed.It can be proven from these results that its electron temperature can be increased by decreasing the filled pressure and can be higher than that in DC discharge

and its electron energy distribution is obviously deviated from Maxwellian.

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