Study on a Novel Gas Sensor

XIE Dan; JIANG Ya-dong; JIANG Jian-zhuang; WU Zhi-ming; LI Yan-rong; PAN Wei

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Study on a Novel Gas Sensor

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- Study on a Novel Gas Sensor
- Acta Electronica Sinica Vol. 29, Issue 8, Pages: 1083-1085(2001)
- 作者机构：
  
  1. 清华大学材料科学与工程系,北京,100084
  2. 电子科技大学信息材料工程学院,四川,成都,610054
  3. 山东大学化学系,山东,济南,250100
  4. 清华大学材料科学与工程系北京,100084
  5. 电子科技大学信息材料工程学院四川成都,610054
  6. 山东大学化学系山东济南,250100
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN643
- Published：2001
- 稿件说明：
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XIE Dan, JIANG Ya-dong, JIANG Jian-zhuang, et al. Study on a Novel Gas Sensor[J]. Acta Electronica Sinica, 2001, 29(8): 1083-1085.
DOI：

XIE Dan, JIANG Ya-dong, JIANG Jian-zhuang, et al. Study on a Novel Gas Sensor[J]. Acta Electronica Sinica, 2001, 29(8): 1083-1085. DOI：

摘要

本文以一种新型有机半导体材料——三明治型稀土金属元素镨双酞菁配合物(Pr

) 为气敏材料

利用Langmuir-Blodgett(LB)超薄膜技术

将Pr

以1:3的配比与十八烷醇(OA)的混合LB多层膜(Pr

/OA)拉制在自行设计的场效应晶体管上

形成了一种新型的以LB膜取代通常的MOSFET中栅金属的化学场效应管器件.将该器件放入NO

气体中

随着气体浓度和LB膜层数的变化

器件的漏电流

将产生0.05×10

-6

A~1.5×10

-6

A的变化

探测灵敏度可达到5ppmNO

这种气敏传感器的气敏特性受到FET的电流放大作用和LB膜有序性的影响.

Abstract

A new kind of sandwich-like Praseodymium bis complex Pr(Pc

)

(Pc

=Pc(OC

)

;R=OC

)is used as film-forming material.Mixed ultrathin films of 1:3 Pr(Pc

)

:octadecanol(OA) have been fabricated using Langmuir-Blodgett (LB) technique.A new gas-sensing device——LB-OS chemFET has been designed on which the Pr(Pc

)

/OA mixed LB film is deposited replacing the gate metal of conventional MOSFET.The sensitive property of Pr(Pc

)

/OA mixed LB film to nitrogen dioxide (NO

) gas is studied by the change of drain current(

) during gas exposure.The chemFET consisting of Pr(Pc

)

/OA mixed LB film can detect NO

gas down to 5ppm.The qualities are attributed to the amplification by the FET and the ordered nature of LB film.The mechanism of sensitivity of Pr(Pc

)

/OA mixed LB film to NO

is also studied in the paper.

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Related Institution

College of Electronic Information and Optical Engineering， Taiyuan University of Technology

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