A Fast Method for 3-D VLSI Interconnect Capacitance Extraction: Quasi-Multiple Medium Method

YU Wen-jian; WANG Ze-yi; HOU Jin-song

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A Fast Method for 3-D VLSI Interconnect Capacitance Extraction: Quasi-Multiple Medium Method

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- A Fast Method for 3-D VLSI Interconnect Capacitance Extraction: Quasi-Multiple Medium Method
- Acta Electronica Sinica Vol. 29, Issue 11, Pages: 1526-1529(2001)
- 作者机构：
  
  1. 清华大学计算机科学与技术系,北京,100084
  2. 中国华大集成电路设计中心,北京,100015
  3. 清华大学计算机科学与技术系北京,100084
  4. 中国华大集成电路设计中心北京,100015
- 作者简介：
- 基金信息：
- DOI：
  CLC： O241
- Published：2001
- 稿件说明：
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YU Wen-jian, WANG Ze-yi, HOU Jin-song. A Fast Method for 3-D VLSI Interconnect Capacitance Extraction: Quasi-Multiple Medium Method[J]. Acta Electronica Sinica, 2001, 29(11): 1526-1529.
DOI：

YU Wen-jian, WANG Ze-yi, HOU Jin-song. A Fast Method for 3-D VLSI Interconnect Capacitance Extraction: Quasi-Multiple Medium Method[J]. Acta Electronica Sinica, 2001, 29(11): 1526-1529. DOI：

摘要

本文提出一种基于直接边界元方法的虚拟多介质(Quasi-Multiple Medium

QMM)加速方法

并将它应用于三维VLSI多介质互连电容的计算中.QMM方法将三维互连电容器中的单层介质看成由多个虚拟介质组成

从而大大减少了系数矩阵中的非零元数目

最终使计算时间和存储空间显著减少.通过比较QMM算法与非QMM算法

以及商业软件Raphael对实际三维互连结构的计算

结果表明QMM算法在保持计算准确性的同时

可使电容提取的效率得到显著提高.

Abstract

A new Quasi-Multiple Medium (QMM) method is presented to accelerate computation of the direct boundary element method

and is applied to extraction of the 3-D interconnect capacitance with multiple dielectrics.Processing single dielectric as a combination of many quasi-multiple mediums

the QMM method produces much fewer non-zero entries in the coefficient matrix.As a result

the QMM method can greatly reduce the CPU time and save memory space used in the capacitance extraction.The QMM computation for several capacitors from actual layout is compared with that of non-QMM and Raphael

a famous commercial tool for parasitic capacitance extraction.The results of numerical experiments verify the analysis.

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