Relation Between Reliability and Yield of IC's Based on Discrete Model

ZHAO Tian-xu; HAO Yue; CHEN Tai-feng; MA Pei-jun

您当前的位置：

首页 >

文章列表页 >

Relation Between Reliability and Yield of IC's Based on Discrete Model

更新时间：2025-07-16

- Relation Between Reliability and Yield of IC's Based on Discrete Model
- Acta Electronica Sinica Vol. 29, Issue 11, Pages: 1515-1518(2001)
- 作者机构：
  
  西安电子科技大学微电子所,陕西,西安,710071
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN406
- Published：2001
- 稿件说明：
移动端阅览
ZHAO Tian-xu, HAO Yue, CHEN Tai-feng, et al. Relation Between Reliability and Yield of IC's Based on Discrete Model[J]. Acta Electronica Sinica, 2001, 29(11): 1515-1518.
DOI：

ZHAO Tian-xu, HAO Yue, CHEN Tai-feng, et al. Relation Between Reliability and Yield of IC's Based on Discrete Model[J]. Acta Electronica Sinica, 2001, 29(11): 1515-1518. DOI：

摘要

集成电路的可靠性和成品率是制约半导体制造发展的两个主要因素.如何表征可靠性和成品率之间的关系是一个非常重要的问题.本文利用一种离散的成品率模型导出了二者的关系式

该关系式不仅考虑了线宽、线间距等版图的几何信息同时还考虑了与工艺有关的缺陷粒径分布等参数.通过模拟实验给出了该模型的有效性验证.

Abstract

Yield and reliability are two important factors affecting the development of semiconductor manufacturing.It is an important problem how to express the relation between yield and reliability.In this paper

a discrete yield model is given between yield and reliability

with many factors considered in this model

such as the line width

the spacing between the lines as well as the distribution of the defect size and so on.Finally

the validity of this model is shown by simulation.

关键词

Keywords

references

Views

1106

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Y/R Model of Integrated Circuits Based on the Open Circuit Fault of Interconnections

A Relation Model Between Integrated Circuit Yield and Reliability Based on the Defect’s Uniform Distribution

Dual-Layer Federated Learning Based Edge Collaborative Computing Mechanism for High Dynamic Internet of Vehicle Businesses

Highly Reliable Gate Driver on Array Circuit Using Time-Division Driving Method Base on IGZO Thin Film Transistor

Study of Highly Reliable Gate Driver on Array Based on InGaZnO Thin Film Transistor

Related Author

ZHAO Tian-xu

HAO Yue

MA Pei-jun

ZHAO Tian-xu

DUAN Xu-chao

XU Si-ya

GUO Jia-hui

ZHOU Liu-fei

Related Institution

Microelectronics Institute of Xidian University Xi'an

Department of mathematics of Baoji college of Arts and science

Microelectronics Institute of Xidian University Xi'anShaanxi 710071China

Department of mathematics of Baoji college of Arts and scienceBaojiShaanxi 721007China

Computation and Information Institute, Baoji University of Arts and Sciences

⁰