used in the semiconductor device comprehensive system
is improved.The real-valued design space is transformed into integer-valued design space according to the effects of the technical precision of the processing parameters.An adaptive combined operator is introduced to extend and exploit the quasi-feasible space by utilizing the searched points.While keeping the advantage to find the solutions
the coverage of the solution space is improved (about 2.87 times) with same setting.This will help the designers to design workable device more efficiently.