This paper presents the modeling and numeric calculations of a radio frequency(RF)/microwave MEMS shunt switch.The movement behavior of the movable membrane is taken as a single directional damped oscillation under an electrostatic force

an elastic recovery force and a drag force in the air.A set of mathematic formula and calculated results are given for a typical MEMS shunt switch.The calculated switching times for typical MEMS shunt switches are about 1~40μs

depending on the thickness of the membrane

constitutive materials and structure parameters.The obtained results are well agreed with the reported experimental ones

.Finally

The limitations about the modeling and numerical calculations are discussed.