Analysis of 3D-Substrate Coupling in RF-MEMS Inductors by Extended PEEC

LONG Hai-bo; ZHANG Yao-jiang; FENG Zheng-he

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Analysis of 3D-Substrate Coupling in RF-MEMS Inductors by Extended PEEC

更新时间：2025-07-16

- Analysis of 3D-Substrate Coupling in RF-MEMS Inductors by Extended PEEC
- Acta Electronica Sinica Vol. 30, Issue 9, Pages: 1308-1312(2002)
- 作者机构：
  
  清华大学电子工程系微波与数字通信国家重点实验室,北京,100084
- 作者简介：
- 基金信息：
- DOI：
  CLC： TM15
- Published：2002
- 稿件说明：
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LONG Hai-bo, ZHANG Yao-jiang, FENG Zheng-he. Analysis of 3D-Substrate Coupling in RF-MEMS Inductors by Extended PEEC[J]. Acta Electronica Sinica, 2002, 30(9): 1308-1312.
DOI：

LONG Hai-bo, ZHANG Yao-jiang, FENG Zheng-he. Analysis of 3D-Substrate Coupling in RF-MEMS Inductors by Extended PEEC[J]. Acta Electronica Sinica, 2002, 30(9): 1308-1312. DOI：

摘要

本文扩展了部分元等效电路(PEEC)法来分析RF-MEMS电感的三维结构衬底耦合.将电边界条件引入PEEC法中

从而得到包含了衬底耦合的电容矩阵;通过电荷源等效使得在部分元的计算中能应用均匀介质空间的格林函数;应用合适的网格单元尺寸而引入电磁场滞后效应

使得在较大尺寸器件和较高频段时仍能保证PEEC法的高精度.这些改进降低了分析的复杂度和计算量

并保持了高精度.根据该方法编制的程序的数值结果与已发表的实验数据吻合得很好.

Abstract

This paper extends PEEC method for fast-accurate electromagnetic analysis of RF-MEMS spiral inductors.By introducing electrical boundary conditions into PEEC

the capacitance matrix is extended to include 3D-substrate coupling.With equivalent of charges in interface

Green functions in uniform dielectric regions can be used in calculation.By using proper mesh size and considering retardation times

the precision of PEEC can be maintained even in tough cases.These improvements reduce the analysis complexity and calculation time.The numeric results show good agreement with published measurement data.

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