Design and Fabrication of Silicon Micromachining Suspended Inductor

DING Yong; LIU Ze-wen; LIU Li-tian; LI Zhi-jian

您当前的位置：

首页 >

文章列表页 >

Design and Fabrication of Silicon Micromachining Suspended Inductor

更新时间：2025-07-16

- Design and Fabrication of Silicon Micromachining Suspended Inductor
- Acta Electronica Sinica Vol. 30, Issue 11, Pages: 1597-1600(2002)
- 作者机构：
  
  清华大学微电子学研究所,北京,100084
- 作者简介：
- 基金信息：
- DOI：
  CLC： TM55TN305
- Published：2002
- 稿件说明：
移动端阅览
DING Yong, LIU Ze-wen, LIU Li-tian, et al. Design and Fabrication of Silicon Micromachining Suspended Inductor[J]. Acta Electronica Sinica, 2002, 30(11): 1597-1600.
DOI：

DING Yong, LIU Ze-wen, LIU Li-tian, et al. Design and Fabrication of Silicon Micromachining Suspended Inductor[J]. Acta Electronica Sinica, 2002, 30(11): 1597-1600. DOI：

摘要

本文系统分析了影响平面螺旋电感

值的主要因素

并制作出一种应用于射频通信的硅微机械悬浮结构电感.在考虑趋肤效应、涡流损耗等高频电磁场效应对电感

值的影响后

获得了微机械电感的简化电学模型

得到了具有较高

值电感的优化结构.在制作硅微机械电感的工艺过程中

采用多孔硅作为牺牲层材料

将螺旋结构铝线圈制作在二氧化硅薄膜上

在使用添加了硅粉和过硫酸铵的TMAH溶液释放牺牲层之后

得到设计值为4nH的悬浮结构微机械平面螺旋电感.实验结果证明

整个工艺流程可靠

并与CMOS工艺兼容.

Abstract

The factors which determine the quality (Q) factor of planar spiral inductor are presented in this paper

and a technology to fabricate suspended MEMS devices for RF circuits is presented.A simplified electrical model is used to study the influence of high-frequency magnetic fields on the parasitical resistance

including the eddy effect and skin effect.To get high-Q suspended inductor

porous silicon (PS) is used as sacrificial layer

and SiO

film is used as a support membrane.During the process

TMAH solution with Si powder and (NH

)

is used to remove the PS layer through small etching holes with no influence on the uncovered Al in the devices.A suspended inductor structure is realized using this technology. The fabrication is proved to be reliable.

关键词

Keywords

references

Views

1049

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Optimization of the Output Power of Cantilever Piezoelectric Vibration Energy Harvesting

Research for RF Micromechanical CPW Switch

A Scalable Model of Spiral Inductor on Modified 1-π Topology

Related Author

BAI Feng-xian

MA Gui-shuai

DONG Wei-jie

SUN Jian-zhong

ZHANG Zheng-yuan

WEN Zhi-yu

XU Shi-lu

ZHANG Zheng-fan

Related Institution

College of Electronic Science and Technology, Dalian University of Technology

College of Electrical Engineering, Dalian University of Technology

College of Electronic Science and Technology Dalian University of Technology Dalian Liaoning China

College of Electrical Engineering Dalian University of Technology Dalian Liaoning China

Dept.of Optoelectronic Eng.Chongqing University

⁰