An Energy Transfer Photochemical Model for the Abatement of Total Organic Carbon in High Purity Water Used in ULSI Fabrication

WEN Rui-Mei; LIANG Jun-Wu

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An Energy Transfer Photochemical Model for the Abatement of Total Organic Carbon in High Purity Water Used in ULSI Fabrication

更新时间：2025-07-16

- An Energy Transfer Photochemical Model for the Abatement of Total Organic Carbon in High Purity Water Used in ULSI Fabrication
- Acta Electronica Sinica Vol. 31, Issue 11, Pages: 1601-1604(2003)
- 作者机构：
  
  1. 同济大学,上海,200092
  2. 中科院半导体所,北京,100083
  3. 同济大学上海,200092
  4. 中科院半导体所北京,100083
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN405
- Published：2003
- 稿件说明：
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WEN Rui-Mei, LIANG Jun-Wu. An Energy Transfer Photochemical Model for the Abatement of Total Organic Carbon in High Purity Water Used in ULSI Fabrication[J]. Acta Electronica Sinica, 2003, 31(11): 1601-1604.
DOI：

WEN Rui-Mei, LIANG Jun-Wu. An Energy Transfer Photochemical Model for the Abatement of Total Organic Carbon in High Purity Water Used in ULSI Fabrication[J]. Acta Electronica Sinica, 2003, 31(11): 1601-1604. DOI：

摘要

本文提出用185nm紫外线降低高纯水中总有机碳(TOC)的能量传递光化学模型.计算了水的流量、TOC的浓度、照射腔的尺寸与所需紫外光能量的关系

从而解决了在工程设计中185nm紫外灯的选择和计算方法.根据理论计算出的结果和实验十分一致

证实了本模型的正确性.使高纯水中的TOC由4200μg/l 降至0.3μg/l

是目前国内外高纯水中TOC浓度的最好水平.

Abstract

An energy transfer photochemical model for the abatement of total organic carbon(TOC)in high purity water using 185nm Ultraviolet(UV)irradiations is proposed.The dependence of 185nm UV irradiation energy on the water flow rates

TOC concentrations and size of irradiation cell has been established.The models of selection of 185nm UV source and calculation in engineering design have been solved.The theoretical calculation agrees with experiments

which proves the model to be correct.The TOC concentrations in high purity water were decreased from 4200μg/L to 0.3μg/L

which is the lowest concentration of TOC.

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