The Calculation of Switching Time for a MOEMS Optical Switch

SUN Dong-ming; DONG Wei; LIU Cai-xia; GUO Wen-bin; ZHANG Xin-dong; JI Ping; XU Bao-kun; CHEN Wei-you

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The Calculation of Switching Time for a MOEMS Optical Switch

更新时间：2025-07-16

- The Calculation of Switching Time for a MOEMS Optical Switch
- Acta Electronica Sinica Vol. 31, Issue 11, Pages: 1671-1673(2003)
- 作者机构：
  
  吉林大学集成光电子学国家重点实验室吉林大学实验区,吉林,长春,130023
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN957
- Published：2003
- 稿件说明：
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SUN Dong-ming, DONG Wei, LIU Cai-xia, et al. The Calculation of Switching Time for a MOEMS Optical Switch[J]. Acta Electronica Sinica, 2003, 31(11): 1671-1673.
DOI：

SUN Dong-ming, DONG Wei, LIU Cai-xia, et al. The Calculation of Switching Time for a MOEMS Optical Switch[J]. Acta Electronica Sinica, 2003, 31(11): 1671-1673. DOI：

摘要

本文结合静电驱动扭臂式MOEMS光开关

给出了响应时间的计算方法

得出开关时间的计算公式.分析了器件几何参数对开关时间的影响

给出了开关时间随参数的变化趋势.通过优化结构给出一组几何参数

保证了驱动电压在10V左右

开关时间可以达到1至2ms.

Abstract

The switching time calculation method of the electrostatic driven MOEMS optical switch with torsion beam structure was presented

and the formula of the switching time was given.We gave the switching time for different structures.Finally optimization structure parameters are given

the electrostatic driving voltage is about 10V and the switching time is 1~2ms.

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