To avoid the "crowding phenomenon" in conformal mapping
approximate analytical expressions of characteristic parameter for CPW's on a thin substrate have been derived.Combining these expressions with the partial capacitance method
we can calculate the characteristic parameters for CPW's with a thin insulative film between the conductors and substrate.A practical example is analyzed and agrees well with the test data.Finally the effect of an insulated thin film between the conductors and Si-substrate on loss factor of microwave transmission lines is analyzed.