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1. 东南大学国家ASIC工程中心,浙江,南京,210096
2. 安徽大学电子系,安徽,合肥,230039
3. 东南大学国家ASIC工程中心浙江南京,210096
4. 安徽大学电子系安徽合肥,230039
Published:2005
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LU Sheng-Li, KE Dao-ming, CHEN Jun-ning, et al. An Analysis Model for the Output Voltage of Four-Terminal Silicon Pressure Transducers[J]. Acta Electronica Sinica, 2005, 33(5): 912-914.
本文用摄动法求解了横向压阻效应四端硅压力传感器输出电压的两维偏微分方程
导出了器件的输出电压与器件尺寸的关系;证明了随应力而变的输出电压最大值在器件横向
L
/2处
并给出了最大输出电压的解析表达式.这些解析公式得到的计算结果
都和数值解、实验数据相符合
说明了得到的公式具有高的精度.用所给的解析表达式可以很方便地进行器件设计和模拟.
The paper resolved a two-dimensional partial differential equation of transverse piezoresistive effect transducers with a method of perturbation.A relationship between the output voltage and device size has been gotten.We also verify that the maximum output voltage is located at middle point of output terminal.An expression of the maximum output voltage has been given.The calculation results based on the expressions are fit to numerical and experimental values of devices.It shows that the analysis model we have gotten is right.These expressions based on the paper can be used in design and simulation of four-terminal piezoresistive pressure transducers.
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