Research Progress of Modeling Methods and Scheduling Strategies for Semiconductor Wafer Fabrication

CAO Zheng-cai; QIAO Fei; WU Qi-di

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Research Progress of Modeling Methods and Scheduling Strategies for Semiconductor Wafer Fabrication

更新时间：2025-07-16

- Research Progress of Modeling Methods and Scheduling Strategies for Semiconductor Wafer Fabrication
- Acta Electronica Sinica Vol. 34, Issue S1, Pages: 2518-2525(2006)
- 作者机构：
  
  同济大学CIMS研究中心,上海,200092
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP278
- Published：2006
- 稿件说明：
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CAO Zheng-cai, QIAO Fei, WU Qi-di. Research Progress of Modeling Methods and Scheduling Strategies for Semiconductor Wafer Fabrication[J]. Acta Electronica Sinica, 2006, 34(S1): 2518-2525.
DOI：

CAO Zheng-cai, QIAO Fei, WU Qi-di. Research Progress of Modeling Methods and Scheduling Strategies for Semiconductor Wafer Fabrication[J]. Acta Electronica Sinica, 2006, 34(S1): 2518-2525. DOI：

摘要

半导体生产线是典型多重入复杂的制造系统

具有可重入性、复杂性、不确定性、多目标和多约束等特点

其优化调度问题是近年来控制领域的一个重要研究方向.本文根据近些年来这一研究方向上的主要研究成果

系统评述了国内外半导体生产线调度的建模方法和调度策略的研究进展

分析和讨论它们各自的主要优缺点和适用范围

简要介绍了重调度判定依据及所采用的方法

并指出半导体制造领域中值得进一步研究的一些问题和可能发展的方向.

Abstract

Semiconductor wafer fabrication is a class of typical re-entrant complicated manufacturing system

which has important characteristics such as re-entrant process flows

complexity

uncertainty

multi objective and multi-constrain.Nowadays

optimized scheduling problem for wafer fabrication is an important research branch in the control.In this paper

the research progress of modeling methods and scheduling strategies for semiconductor wafer fabrication are systemically reviewed according to the main research achievements in recent years

and their primary virtues and deficiencies are also analyzed and discussed

furthermore

their applicable cope are also presented.On the other hand

the criterions and methods of rescheduling are briefly generalized.Some problems worthy of further study and probably developing trends in the semiconductor manufacturing field are presented.

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Related Institution

(1. 北京化工大学信息科学与技术学院, 北京100029 2. 同济大学CIMS研究中心，)

School of Software Engineering, South China University of Technology

1.北京大学信息科学技术学院

北京大学软件工程国家工程研究中心

北京大学信息科学技术学院软件研究所高可信软件技术教育部重点实验室

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