An electrostatically actuated in-situ measuring method for average stress gradient and elastic modulus of a MEMS film was proposed based on pull-in voltages of a set of cantilevers.The key of the measuring method is to realize rapid and accurate calculation of pull-in voltages of the cantilevers.To increase the accuracy of the measurement

bending of the cantilevers along the width direction due to the stress gradient was considered.Actual simulations indicate that the calculating speed and the accuracy of the measuring method are ideal

and the method can apply to in-situ measurement.