A Simplified Approach for Calculation Zero-Order Diffraction of the 1-D Grating with the Incident Plane Parallel to the Grating Line

CHEN Shu-qiang

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A Simplified Approach for Calculation Zero-Order Diffraction of the 1-D Grating with the Incident Plane Parallel to the Grating Line

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- A Simplified Approach for Calculation Zero-Order Diffraction of the 1-D Grating with the Incident Plane Parallel to the Grating Line
- Acta Electronica Sinica Vol. 39, Issue 8, Pages: 1878-1882(2011)
- 作者机构：
  
  1. 电子科技大学物理电子学院,四川,成都,610054
  2. 电子科技大学物理电子学院四川成都,610054
- 作者简介：
- 基金信息：
- DOI：
  CLC： O438.2
- Published：2011
- 稿件说明：
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CHEN Shu-qiang. A Simplified Approach for Calculation Zero-Order Diffraction of the 1-D Grating with the Incident Plane Parallel to the Grating Line[J]. Acta Electronica Sinica, 2011, 39(8): 1878-1882.
DOI：

CHEN Shu-qiang. A Simplified Approach for Calculation Zero-Order Diffraction of the 1-D Grating with the Incident Plane Parallel to the Grating Line[J]. Acta Electronica Sinica, 2011, 39(8): 1878-1882. DOI：

摘要

FONT face=Verdana>耦合波分析法(RCWA)方法是目前研究光栅衍射最普遍的方法.垂直入射到光栅表面的光使衍射光的正负

级衍射波处于对称状态

使得在RCWA法中原先需要计算2

+1级衍射的2

+1阶矩阵问题降低到计算

+1级衍射的

+1阶矩阵问题.本文将这种对称结构的简化方法推广到非垂直入射、光栅条纹在入射平面内的情况

使得在这种耦合情况下的2(2

+1)阶矩阵问题简化为2(

+1)阶矩阵问题.同时针对小角度入射的情况提出了进一步简化计算方法将其简化为(

+1)阶矩阵问题.实验表明在较大的范围内

其误差均可接受

在工程应用具有重要的意义.

Abstract

The rigorous couple wave analysis(RCWA) is one of the most common methods for the study of grating diffraction.For the incident beam normal to the surface of the grating

the positive and negative

diffraction orders are same due to the symmetry

which lead to the great simplified in by decreasing matrix size from 2

+1 to

+1.In this paper

the simplified method is extended to the case that the incident plane parallel to the grating line.In this case

the problem of matrix size 2(2

+1) (due to the coupling of different polarization states) can be reduced to the problem of matrix size 2(

+1).Furthermore

some more simple approach for

the small incident angle is discussed

in which the problem of matrix size 2(

+1) can be reduced to (

+1).The typical simulation shows that the error is acceptable in quite a large range

which is important in practical use.

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