Petri Net Based Scheduling for Integrated Circuits Manufacturing

XUE Lei; HAO Yue

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Petri Net Based Scheduling for Integrated Circuits Manufacturing

更新时间：2025-07-16

- Petri Net Based Scheduling for Integrated Circuits Manufacturing
- Acta Electronica Sinica Vol. 29, Issue 8, Pages: 1064-1067(2001)
- 作者机构：
  
  西安电子科技大学微电子所,陕西,西安,710071
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN454.06
- Published：2001
- 稿件说明：
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XUE Lei, HAO Yue. Petri Net Based Scheduling for Integrated Circuits Manufacturing[J]. Acta Electronica Sinica, 2001, 29(8): 1064-1067.
DOI：

XUE Lei, HAO Yue. Petri Net Based Scheduling for Integrated Circuits Manufacturing[J]. Acta Electronica Sinica, 2001, 29(8): 1064-1067. DOI：

摘要

本文提出了一个新的面向集成电路(IC)制造的调度方法

核心内容包括两方面:首先

用本文提出的扩展定时Petri 网对IC生产工艺进行描述;其次

对所得Petri 网模型的状态空间进行搜索

得到以Transition序列表示的最优或近似最优调度.该方法可以很好地描述IC制造系统中存在的多制造路径、资源共享、可变晶片组及并发等特性

通过引入测试弧增强Petri 网的建模能力

进而在调度模型上对设备维护、设备优先级以及操作优先级进行描述

而且支持多目标的评价函数

使得到的调度结果更具实用价值.文中给出试验结果表明了算法的有效性.

Abstract

Petri net modeling combined with heuristic search provides a new scheduling method for Integrated Circuits (IC) manufacturing systems.The method includes two steps.First

it formulates the scheduling problem with extended timed-place Petri net model.Second

with the help of heuristic function to limit the search space

it applies a search algorithm to reachability graph of the Petri net model to find an optimal or near optimal feasible schedule in terms of the firing sequence of the transitions.Introducing the test arc to traditional timed-place Petri net

this paper proposed a new Petri net

the extended timed-place Petri net.It can concisely represent not only features of IC manufacturing system

such as routing flexibility

shared resources

varied lot sizes

etc.

but also the device maintenance

device priority and operation priority.Therefore

the schedule obtained is more practical.Experimental results are presented to show the effectiveness of the method.

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Related Institution

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