The combs of the comb capacitive inertial sensors fabricated by a deep reactive ion etching (DRIE) are usually not parallel.In this paper

inertial pulse response of MEMS capacitive accelerometer with non-parallel combs is studied considering the air damping in low vacuum

and the effects of DRIE process on performance of the micro-accelerometer are analyzed.The results show that for double-sided structure

the non-parallel comb factor influences the displacement caused by outside acceleration and decreases the linearity range of inertial pulse response of the sensors

as the air pressure becomes smaller

the effects are more obvious.For double-sided structure with feedback voltage

the feedback force decreases the sensitivity of pulse inertial signal

but the effects of DRIE on the performances of the sensor become smaller compared to the structure without feedback voltage.To restrain the non-parallel factor of DRIE process

a novel MEMS capacitive accelerometer structure is proposed

and the primary performance is analyzed by FEM tool ANSYS and the detailed fabricated process is designed.