Petri-Net and GA-Based Approach to Modeling and Optimize for Semiconductor Wafer Fabrication

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Petri-Net and GA-Based Approach to Modeling and Optimize for Semiconductor Wafer Fabrication

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- Petri-Net and GA-Based Approach to Modeling and Optimize for Semiconductor Wafer Fabrication
- Acta Electronica Sinica Vol. 38, Issue 2, Pages: 340-344(2010)
- 作者机构：
  
  (1. 北京化工大学信息科学与技术学院, 北京100029 2. 同济大学CIMS研究中心，),上海,201804
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP273
- Published：2010
- 稿件说明：
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FONT face, Verdana, CAO Zheng-cai, et al. Petri-Net and GA-Based Approach to Modeling and Optimize for Semiconductor Wafer Fabrication[J]. Acta Electronica Sinica, 2010, 38(2): 340-344.
DOI：

FONT face, Verdana, CAO Zheng-cai, et al. Petri-Net and GA-Based Approach to Modeling and Optimize for Semiconductor Wafer Fabrication[J]. Acta Electronica Sinica, 2010, 38(2): 340-344. DOI：

摘要

<FONT face=Verdana>针对半导体生产线调度复杂、难以优化的问题，本文提出了一种基于层次有色赋时Petri网技术和遗传算法相结合的优化调度方法。该方法利用层次化的方法结合自顶向下建模方法对半导体生产线进行模块化建模，模型不仅能够反映生产线的待加工产品的多条加工路径及其资源约束，还可以对系统的设备维护、各种优先级等特性进行描述，得到对生产系统更完善更精确的刻画。通过在遗传算法编码中同时考虑投料策略、工件选设备规则、批加工调度规则和单件加工设备规则等因素得到更加有效的调度方案，提高了模型的优化程度。在此基础上，对实际半导体生产线的不同调度方案分别进行了仿真，并对仿真结果进行了比较，从而验证了建模方法的正确性及调度策略的有效性。

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