Analysis of the electrostatic capacitance of an integrated capacitive sensor’s external electrons

FONT face; Verdana; Wang Yang; Chen Jun-Ning; Ke Dao-Ming; FONT

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Analysis of the electrostatic capacitance of an integrated capacitive sensor’s external electrons

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- Analysis of the electrostatic capacitance of an integrated capacitive sensor’s external electrons
- Acta Electronica Sinica Vol. 38, Issue 6, Pages: 1410-1413(2010)
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  CLC： TP212
- Published：2010
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FONT face, Verdana, Wang Yang, et al. Analysis of the electrostatic capacitance of an integrated capacitive sensor’s external electrons[J]. Acta Electronica Sinica, 2010, 38(6): 1410-1413.
DOI：

FONT face, Verdana, Wang Yang, et al. Analysis of the electrostatic capacitance of an integrated capacitive sensor’s external electrons[J]. Acta Electronica Sinica, 2010, 38(6): 1410-1413. DOI：

摘要

<FONT face=Verdana>本文研究一种梳齿电极结构的集成电容式传感器，利用保角变换对其边界电极的静电电容值情况进行推导，给出了边界电极电容值的解析表达式，并利用Ansys软件对其进行仿真验证。结果显示解析公式得到的计算结果和软件仿真结果相吻合，说明得到的公式具有高的精度。利用所给的解析表达式可以为设计和应用该结构电容式传感器提供更好的理论基础。

Abstract

<FONT face=Verdana>An integrated capacitive sensor with comb electrodes is researched and the electrostatic capacitance of its external electrons is analyzed using conformal transformation. The analysis expressions and physical model are built and simulated by Ansys. The calculation results based on the expressions are in agreement with the simulation results by Ansys. It shows that the theoretical model we have gotten is right. These expressions can be used in design and application of capacitive sensors with comb electrodes.

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