HSGFET Ozone Sensor with Dual Sensitive Layer Operating at Room Temperature

NIU Wen-cheng; SUN Xue-zhu; WU Xiao-ye; LI Hua-wei; NA Xing-bo; YU Mei; CHEN Xing-wu; ZHANG Fu-hai; XIE Jian-xiang

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HSGFET Ozone Sensor with Dual Sensitive Layer Operating at Room Temperature

更新时间：2025-07-16

- HSGFET Ozone Sensor with Dual Sensitive Layer Operating at Room Temperature
- Acta Electronica Sinica Vol. 29, Issue 5, Pages: 604-606(2001)
- 作者机构：
  
  1. 南开大学信息技术科学学院,天津,300071
  2. 天津大学精密仪器与光电子工程学院,天津,300072
  3. 南开大学信息技术科学学院天津,300071
  4. 天津大学精密仪器与光电子工程学院天津,300072
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN37+9
- Published Online：25 May 2001，
  
  Published：2001
- 稿件说明：
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NIU Wen-cheng, SUN Xue-zhu, WU Xiao-ye, et al. HSGFET Ozone Sensor with Dual Sensitive Layer Operating at Room Temperature[J]. Acta Electronica Sinica, 2001, 29(5): 604-606.
DOI：

NIU Wen-cheng, SUN Xue-zhu, WU Xiao-ye, et al. HSGFET Ozone Sensor with Dual Sensitive Layer Operating at Room Temperature[J]. Acta Electronica Sinica, 2001, 29(5): 604-606. DOI：

摘要

本文研究室温下工作

具有双敏感膜

检测ppb范围内O

浓度的复合悬浮栅FET(Hybrid Suspended Gate Field Effect Transistor即HSGFET)型臭氧传感器.文中给出了四种固态HSGFET型臭氧传感器的实验结果

发现具有结构的传感器对O

有很好的响应特性;实验结果与由开尔芬(Kelvin)探针得到的结果进行了比较.

Abstract

This paper studies hybrid suspended gate FET(HSGFET)ozone sensor with dual sensitive layer for detecting ozone in ppb range at room temperature.From the results of our experiments for the four solid HSGFET ozone sensors

we found the sensor with structure has excellent response to ozone.Results obtained by the HSGFET correspond to those obtained by the Kevin probe.

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