Analyses of Fifth  Order Aberrations of Rotationally  Symmetric Electron Optical System

Mu Chongjun; Chen Ergang; Gao Jun; Li Chuan

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Analyses of Fifth Order Aberrations of Rotationally Symmetric Electron Optical System

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- Analyses of Fifth Order Aberrations of Rotationally Symmetric Electron Optical System
- Acta Electronica Sinica Issue 8, (1999)
- 作者机构：
  
  云南大学物理系
- 作者简介：
- 基金信息：
- DOI：
  CLC： O463.1
- Published：1999
- 稿件说明：
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[1]木崇俊,陈尔纲,高俊,李川.旋转对称电子光学系统的五级几何像差分析[J].电子学报,1999(08):68-70.

Mu Chongjun, Chen Ergang, Gao Jun, et al. Analyses of Fifth Order Aberrations of Rotationally Symmetric Electron Optical System[J]. Acta Electronica Sinica, 1999, (8).
[1]木崇俊,陈尔纲,高俊,李川.旋转对称电子光学系统的五级几何像差分析[J].电子学报,1999(08):68-70. DOI：

Mu Chongjun, Chen Ergang, Gao Jun, et al. Analyses of Fifth Order Aberrations of Rotationally Symmetric Electron Optical System[J]. Acta Electronica Sinica, 1999, (8). DOI：

摘要

本文将旋转对称电子光学系统五级几何像差按边界条件分成球差、彗差、亚像散和场曲、亚彗差、像散和场曲、畸变等六类，并分析各类像差在高斯像平面上的图像．

Abstract

Fifth order geometrical aberrations of rotationally symmetric electron optical system are divided into six types according to boundary condition.They are spherical aberration

coma

sub field curvature and astigmatism

sub coma

field curvature and astigmatism and distortion.Analyses for every type’s scattering pattern in Gaussian image plane are also given in detail.

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