A Computer Controlled MOCVD Circuit and Its Application

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- A Computer Controlled MOCVD Circuit and Its Application
- Acta Electronica Sinica Issue 7, (1999)
- 作者机构：
  
  1. 中国科学院上海冶金所
  2. 西安交通大学
  3. 中国科学院上海冶金所西安交通大学
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN405.986
- Published：1999
- 稿件说明：
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[1]孙一军,夏冠群,张良莹,姚熹.MOCVD自动控制电路的设计及其应用[J].电子学报,1999(07):125-127.

Sun Yijun, Xia Guanqun. A Computer Controlled MOCVD Circuit and Its Application[J]. Acta Electronica Sinica, 1999, (7).
[1]孙一军,夏冠群,张良莹,姚熹.MOCVD自动控制电路的设计及其应用[J].电子学报,1999(07):125-127. DOI：

Sun Yijun, Xia Guanqun. A Computer Controlled MOCVD Circuit and Its Application[J]. Acta Electronica Sinica, 1999, (7). DOI：

本文设计了ＭＯＣＶＤ自动控制电路，该电路既能手动控制又能采用计算机进行自动控制．将该电路应用于ＭＯＣＶＤ系统，成功制备出ＴｉＯ２纳米级超细粉，在５００℃～１０００℃范围内，超细粉的平均晶粒尺寸为７４～１５２ｎｍ．

In this paper

a computer controlled MOCVD circuit is designed

and the circuit can be controlled not only by control board manually

but also by computer automatically.Applying this circuit to MOCVD system

TiO2 nanosized ultra fine powders with average grain size about 74152nm are prepared from 500 to 1000.

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