Following the development of micro/nano science and technology

one of the most important technologies in microfabrication and microanalyses

focused ion beam （FIB） technology

is gaining more interests. In this paper

the main functions of FIB technology with liquid metal ion ires （LMIS） is summarized briefly. Its recent applications in the following regions are reviewed in detail: （1） In integrated semiconductor circuits: integrating devices

failure analysis and repair. （2）In integrated optoelectronic circuits: the fabrication of quantum well laser and phase mask for optical fiber

the research of quantum effeCts. （3）the fabrications of superconductor devices and vacuum microelectronic devices. （4）the technology of secondary ion mass spectrometry and the preparation of specimens for transmission electron microscopy.