The Computer Simulation for the Strain Distribution  of the Twin Isles Polysilicon Pressure Sensor

YAO Su  ying; QU Hong  wei; ZHANG Wei  xin; MAO Gan  ru; LI Yong  sheng

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The Computer Simulation for the Strain Distribution of the Twin Isles Polysilicon Pressure Sensor

更新时间：2025-12-08

- The Computer Simulation for the Strain Distribution of the Twin Isles Polysilicon Pressure Sensor
- Acta Electronica Sinica Issue 11, (1999)
- 作者机构：
  
  天津大学电子与信息工程学院,天津,300072
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP212.1
- Published：1999
- 稿件说明：
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[1]姚素英,曲宏伟,张维新,毛赣如,李永生.多晶硅双岛压力传感器应力分布的模拟计算[J].电子学报,1999(11):69-71.

YAO Su ying, QU Hong wei, ZHANG Wei xin, et al. The Computer Simulation for the Strain Distribution of the Twin Isles Polysilicon Pressure Sensor[J]. Acta Electronica Sinica, 1999, (11).
[1]姚素英,曲宏伟,张维新,毛赣如,李永生.多晶硅双岛压力传感器应力分布的模拟计算[J].电子学报,1999(11):69-71. DOI：

YAO Su ying, QU Hong wei, ZHANG Wei xin, et al. The Computer Simulation for the Strain Distribution of the Twin Isles Polysilicon Pressure Sensor[J]. Acta Electronica Sinica, 1999, (11). DOI：

摘要

本文用有限单元法对双岛型多晶硅压力传感器的应力分布进行了计算机模拟.根据模拟计算的应力分布规律

优化多晶硅应变电阻的设计

弥补了多晶硅压阻系数低于单晶硅的缺点

研制出了双岛结构多晶硅压力传感器.传感器具有高灵敏度和高的工作温度.计算分析结果与实验基本相符

Abstract

The strain distribution of the twin isles structure polysillcon pressure sensor has been simulated by computer with the finite element method.According to the law of the strain distribution

polysilicon piezoresistor has been optimally designed.Moreover

the disadvantage which piezoresistor coefficient of polysilicon is lower than monocrystalline silicon is remedied.A new twin isles polysilicon pressure sensor has been designed and fabricated.The sensor has high sensitivity and elevated operation temperature.The experimental results in accord with the simulation.

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