Instead of the direct expansion of the charge distribution by the orthogonal wavelet basis

the large full matrix gained from MoM （Method of Moments） discretization of the integral equations is taken as discrete digital signals and sparsified by two dimensional multiresolution representation.Thus

the difficulty of using wavelets on the two and three dimensional structures is overcome.Computational results are given for several typical interconnects and the data obtained show that the proposed method substantially sparsifies the matrix equation.The capacitance values calculated by the matrix equations with high sparsity agree well with the results of the previous papers and that of capacitance extractor FASTCAP.