The Optical Excitation of Silicon Microresonator

Yu Hao; Ding Chun; Jin Zhonghe; Xu Yigang; Wang Yuelin

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The Optical Excitation of Silicon Microresonator

更新时间：2025-12-08

- The Optical Excitation of Silicon Microresonator
- Acta Electronica Sinica Issue 6, Pages: 23-25(1998)
- 作者机构：
  
  1.   浙江大学信电系
  2.   浙江大学信电系硅材料国家重点实验室
  3.   杭州 310027
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN25
- Published：1998
- 稿件说明：
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[1]喻浩,丁纯,金仲和,徐义刚,王跃林.硅微谐振器的光激励[J].电子学报,1998(06):23-25.

Yu Hao, Ding Chun, Jin Zhonghe, et al. The Optical Excitation of Silicon Microresonator[J]. Acta Electronica Sinica, 1998, (6): 23-25.
[1]喻浩,丁纯,金仲和,徐义刚,王跃林.硅微谐振器的光激励[J].电子学报,1998(06):23-25. DOI：

Yu Hao, Ding Chun, Jin Zhonghe, et al. The Optical Excitation of Silicon Microresonator[J]. Acta Electronica Sinica, 1998, (6): 23-25. DOI：

摘要

本文对硅悬臂梁谐振子的光激励进行了研究

从理论计算和实验两方面分析了悬臂梁谐振器的光激励特性

获得了谐振器响应的幅频特性曲线和激励光斑位置与谐振器输出关系的曲线

本文的结果为全光型微机械谐振器的研究提供了理论依据。

Abstract

The optical experimentally excitation of a silicon cantilever resonator is studied both theoretically and experimentally. The amplitude-frequency response and the relationship between the output of resonators and the position of excitation are discussed.These results provide the theoretical basis for the optical-micromechanical resonators.

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