PR as an In－Situ Spectroscopy Method to Study Optical Properties of MBE Growing Near－Surface Strudure

刘兴权; 陆卫; 万明芳; 陈效双; 查访星; 严立平; 史国良; 沈学础

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PR as an In－Situ Spectroscopy Method to Study Optical Properties of MBE Growing Near－Surface Strudure

更新时间：2025-12-08

- PR as an In－Situ Spectroscopy Method to Study Optical Properties of MBE Growing Near－Surface Strudure
- Acta Electronica Sinica Issue 11, (1997)
- 作者机构：
  
  1. 上海技术物理研究所
  2. 上海红外物理国家实验室
  3. 上海技术物理研究所上海红外物理国家实验室
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP274
- Published：1997
- 稿件说明：
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[1]刘兴权,陆卫,万明芳,陈效双,查访星,严立平,史国良,沈学础.光调制反射谱作为MBE生长中原位检测手段的应用[J].电子学报,1997(11):67-68+74.

刘兴权, 陆卫, 万明芳, et al. PR as an In－Situ Spectroscopy Method to Study Optical Properties of MBE Growing Near－Surface Strudure[J]. Acta Electronica Sinica, 1997, (11).
[1]刘兴权,陆卫,万明芳,陈效双,查访星,严立平,史国良,沈学础.光调制反射谱作为MBE生长中原位检测手段的应用[J].电子学报,1997(11):67-68+74. DOI：

刘兴权, 陆卫, 万明芳, et al. PR as an In－Situ Spectroscopy Method to Study Optical Properties of MBE Growing Near－Surface Strudure[J]. Acta Electronica Sinica, 1997, (11). DOI：

摘要

本文介绍了光调制光谱（ＰＲ）在ＭＢＥ生长中原位光谱检测中的应用．利用了光调制光谱（ＰＲ）本身特有的在室温下有很高的灵敏度，并进一步与ＭＢＥ系统有效结合，为ＭＢＥ生长原位光谱检测增添了一种可行的手段．

Abstract

This paper describes the combination of the technique of photo-modulated reflectance spectrum （PR）with the molecular beam epitaxy（MBE）system as an in-situ spectrum measuring technique. Making use of the high sensitivity of PR at room temperature

we demonstrate that the combination of the PR with MBE can be a good in-situ measuring method.

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