Research on the Process of Vacuum Microelectronic Flat-Panel Displays

皇甫鲁江; 朱长纯; 淮永进; 铁执玲; 单建安; 郭彩林

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Research on the Process of Vacuum Microelectronic Flat-Panel Displays

更新时间：2025-12-08

- Research on the Process of Vacuum Microelectronic Flat-Panel Displays
- Acta Electronica Sinica Issue 11, (1996)
- 作者机构：
  
  1. 西安交通大学真空微电子研究所
  2. 香港科技大学
  3. 电子部４４００厂
  4. 西安交通大学真空微电子研究所香港科技大学电子部４４００厂
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN873.91
- Published：1996
- 稿件说明：
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[1]皇甫鲁江,朱长纯,淮永进,铁执玲,单建安,郭彩林.真空微电子平板显示器工艺研究[J].电子学报,1996(11):119-121.

皇甫鲁江, 朱长纯, 淮永进, et al. Research on the Process of Vacuum Microelectronic Flat-Panel Displays[J]. Acta Electronica Sinica, 1996, (11).
[1]皇甫鲁江,朱长纯,淮永进,铁执玲,单建安,郭彩林.真空微电子平板显示器工艺研究[J].电子学报,1996(11):119-121. DOI：

皇甫鲁江, 朱长纯, 淮永进, et al. Research on the Process of Vacuum Microelectronic Flat-Panel Displays[J]. Acta Electronica Sinica, 1996, (11). DOI：

摘要

本文介绍了我们最近开发的真空微电子平板数码管工艺，主要包括阳极支柱（阵列）的制作和平板透明真空封装。利用上述工艺已经制成了平板数码营，其栅阴特性理想，阳阴之间也能测得明显的场致发射特性并伴有荧光激发。目前，数码管玻壳内真空度的维持等还存在问题，文章最后分析了其原因。

Abstract

The process developed recently for vacuum microelectronic flat-panel nixie is introduced

including mainly how to fabricate the anode pillars（array）and the transparent flat-panel vacuum packages.Flat-panel nixies have been fabricated by the processing.TheⅠ-Ⅴ characteristic between gates and cathodes is ideal.Field emission characteristic

accompanied with fluorescence light

is also detected between cathodes and anodes.There are still some problems in maintaining the vacuum in package.The reasons are analyzed at the last part of the paper.

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