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清华大学精密仪器与机械学系
Published:1997
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[1]张超,冯冠平.液体介质中厚度切变石英晶体传感器的特征阻尼研究[J].电子学报,1997(02):16-20.
张超, 冯冠平. Study on the Characteristic Damping of the Thickness Shearing Quartz Crystal Sensors in Liquids[J]. Acta Electronica Sinica, 1997, (2).
本文提出一个新概念:特征阻尼系数Kc,用来区分液体中振荡的厚度切变石英晶体传感器由质量负载和液体阻尼分别引起的频率偏移.理论推导表明,当石英晶体表面附着的质量没有变化时,特征阻尼系数Kco的大小与附着的液体或固体性质无关,只取决于晶体谐振器自身的参数,如基频、电极面积和谐波次数等.质量负载只有在特征阻尼系数变化时才产生.本文采用频率、幅值双参数测量方法,对10MHz的AT切变石英晶体谐振器的基频、电极面积和谐波次数对Kco值的影响进行了实验研究,实验结果与理论符合.
A new concept is introduced that characteristic damping coefficient kc is used to distinguish between the effects of mass loading and liquid damping of a quartz resonator vibrating in liquids. It is derived that the value of kco has nothing to do with the properties of liquid and solid deposited on the quartz crystal. It only depends on the parameters of the crystal resonator
such as fundamental frequency
the area of the electrode and the overtone number.The effect of mass loading occurs only when kc varies. By measuring the frequency and amplitude simultaneously
the influence on kco of fundamental frequency
electrode area and overtone number of a 10MHz AT cut quartz crystal resonator is studied.The experimental results fit the theory well.
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