The Development of a Field Emissoin Gun with High Brightness and Small Beam Spot

杨德清; 陈尔纲; 木崇俊

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The Development of a Field Emissoin Gun with High Brightness and Small Beam Spot

更新时间：2025-12-08

- The Development of a Field Emissoin Gun with High Brightness and Small Beam Spot
- Acta Electronica Sinica Issue 6, (1996)
- 作者机构：
  
  云南大学物理系
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN103
- Published：1996
- 稿件说明：
移动端阅览
[1]杨德清,陈尔纲,木崇俊.一种高亮度点状场发射电子枪的研制[J].电子学报,1996(06):15-19+24.

杨德清, 陈尔纲, 木崇俊. The Development of a Field Emissoin Gun with High Brightness and Small Beam Spot[J]. Acta Electronica Sinica, 1996, (6).
[1]杨德清,陈尔纲,木崇俊.一种高亮度点状场发射电子枪的研制[J].电子学报,1996(06):15-19+24. DOI：

杨德清, 陈尔纲, 木崇俊. The Development of a Field Emissoin Gun with High Brightness and Small Beam Spot[J]. Acta Electronica Sinica, 1996, (6). DOI：

摘要

本文对一种自制的场发射电子枪（ＦＥＧ）的结构、使用以及发射和稳定特性作了详细的报道．经测量表明：ＦＥＧ在枪室真空为６．６７×１０－７Ｐａ，场发射工作电流０．９μＡ的条件下，其束流稳定性优于５％（１０ｍｉｎ）；又当加速电压为４０ｋＶ时，其虚源半径小于１．３ｎｍ；而亮度则大于５×１０９Ａ／ｃｍ２·ｓｒ．说明它是一种高亮度小束斑的点状电子源．在ＳＥＭ，ＳＴＥＭ和其它先进的电真空分析仪器以及电子束加工等方面，具有广泛推广的实用价值．

Abstract

The structure

operating and the characteristics of emission and stability of beam current for field emission gun（FEG） are reported. Experimental measurements show that if the vacuum in the gun chamber is better than 6. 67×10-7 Pa and the field emission current is 0. 9μA

the stability of beam current is better than 5% in 10 minutes

and if the acceleration voltage is 40kV

the radius of the virtual source of FEG is smaller than l. 3 nm and the brightness of FEG is higher than 5×109 A/cm2. sr. The results show that it is a new FEG of high brightness with very small beam spot. It can be used in SEM

STEM and other electron probe systenis.

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