Powder Sputtering Plane Thin-Film SnO<sub>2</sub>/CeO<sub>2</sub> Alcohol Sensor

李建明; 刘文利; 裘南畹; 吕红浪

您当前的位置：

首页 >

文章列表页 >

Powder Sputtering Plane Thin-Film SnO₂/CeO₂ Alcohol Sensor

更新时间：2025-12-08

- Powder Sputtering Plane Thin-Film SnO₂/CeO₂ Alcohol Sensor
- Acta Electronica Sinica Issue 5, (1996)
- 作者机构：
  
  1. 山东工业大学数理系
  2. 济南大学机电系
  3. 山东工业大学数理系济南大学机电系
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP212
- Published：1996
- 稿件说明：
移动端阅览
[1]李建明,刘文利,裘南畹,吕红浪.粉末溅射平面薄膜型SnO_2／CeO_2酒敏传感器[J].电子学报,1996(05):114-116.

李建明, 刘文利, 裘南畹, et al. Powder Sputtering Plane Thin-Film SnO₂/CeO₂ Alcohol Sensor[J]. Acta Electronica Sinica, 1996, (5).
[1]李建明,刘文利,裘南畹,吕红浪.粉末溅射平面薄膜型SnO_2／CeO_2酒敏传感器[J].电子学报,1996(05):114-116. DOI：

李建明, 刘文利, 裘南畹, et al. Powder Sputtering Plane Thin-Film SnO₂/CeO₂ Alcohol Sensor[J]. Acta Electronica Sinica, 1996, (5). DOI：

摘要

介绍粉末溅射研制的ＳｎＯ２／ＣｅＯ２酒敏薄膜的性能与膜厚、温度和掺杂量等关系的研究结果，并根据此结果对平面薄膜型酒敏传感器的工艺和结构进行的设计；介绍所研制器件的一些性能，并对有关问题进行讨论。

Abstract

SnO2/CeO2 gas sensing thin films for alcohol were deposited by powder sputtering

whose properties releting to film thickness

temperature and dose are given. For these results above

the technology and structure of plane thin film gas sensors for alcohol were designed. Some properties of these sensors are introduced and the releted problems are discussed.

关键词

Keywords

references

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

A Model of Distributed Sensors' Scheduling and Self-Adaptive Probability Particle Swarm Optimization Algorithm

The Solution to the Problem of the Ambiguity of Angle Calculation in the Polarized Skylight Navigation

A Smart Antenna-Based WLAN Signal Coverage Control Solution

The Highly Sensitive NO₂ Sensors Based on Copper Phthalocyanine Thin Films

Properties of Sensitivity of GaAs MESFET to Stress

Related Author

JIA Zhe

LI Long-yue

XING Qing-hua

REN Jun-liang

LI Yi-bo

WANG Bo

FAN Zhi-guo

GAO Jun

Related Institution

Air Force Command College Beijing China

Air and Missile Defense College Air Force Engineering University Xi'an Shaanxi China

Air Force Command College

Air and Missile Defense College, Air Force Engineering University

School of Computer and Information, Hefei University of Technology

⁰

Powder Sputtering Plane Thin-Film SnO2/CeO2 Alcohol Sensor

DOI：

摘要

Abstract

关键词

Keywords

references

Powder Sputtering Plane Thin-Film SnO₂/CeO₂ Alcohol Sensor