Electrostatic-Excited Silicon-Unitized Micromechanical Resonator

您当前的位置：

首页 >

文章列表页 >

更新时间：2025-12-08

- Electrostatic-Excited Silicon-Unitized Micromechanical Resonator
- Acta Electronica Sinica Issue 8, (1995)
- 作者机构：
  
  浙江大学
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN752.8
- Published：1995
- 稿件说明：
移动端阅览
[1]金仲和,王跃林,徐义刚,丁纯,陈锋.静电驱动硅一体化微机械谐振器[J].电子学报,1995(08):20-23.

金仲和, 王跃林, 徐义刚, et al. Electrostatic-Excited Silicon-Unitized Micromechanical Resonator[J]. Acta Electronica Sinica, 1995, (8).
[1]金仲和,王跃林,徐义刚,丁纯,陈锋.静电驱动硅一体化微机械谐振器[J].电子学报,1995(08):20-23. DOI：

金仲和, 王跃林, 徐义刚, et al. Electrostatic-Excited Silicon-Unitized Micromechanical Resonator[J]. Acta Electronica Sinica, 1995, (8). DOI：

本文利用硅硅直接键合技术引入了一种完全采用单晶硅制作的静电激励的微机械谐振器，文中对静电激励力进行了分析，实测表明该谐振器频率为５．８６ｋＨｚ，品质因数在１０Ｐａ的低真空下即可达６００以上。

A new structure of silicon-unitized resonator is proposed and realized

which is made with SDB technique.Electostatic force is analized in this paper.The resonance frequency of the device is about 5.86kHz by experiment

and the Q-factor is above 600 in 10Pa vacuum.

Views

159

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Design of Frequency Division Pre-Emphasis Circuit Based on Visible Light Communication

The Spectral-Domain Method of Lines and Its Application in 3-D Electromagnetic Field Boundary Value Problems

A Study of Target Structure Imaging and Target Identification Based on Radar Target Optical-Region Frequency Response Data

Related Author

CHEN Yong

REN Zhi-miao

LIU Huan-lin

WU Zhi-qian

HU Chen-yi

Hong Wei

何松华

孙文峰

Related Institution

Key Laboratory of Industrial Internet of Things & Network Control， Ministry of Education， Chongqing University of Posts and Telecommunications

School of Communication and Information Engineering， Chongqing University of Posts and Telecommunications

Southeast University

ATR Laboratory,National University of Defense Technology

⁰