The Microelectromechanical Systems

Wang Yaolin

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The Microelectromechanical Systems

更新时间：2025-12-08

- The Microelectromechanical Systems
- Acta Electronica Sinica Issue 10, (1995)
- 作者机构：
  
  1. 浙江大学
  2. 香港科技大学
  3. 浙江大学香港科技大学
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN40
- Published：1995
- 稿件说明：
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[1]王跃林,苏以撒,王文.微电子机械系统[J].电子学报,1995(10):37-42.

Wang Yaolin. The Microelectromechanical Systems[J]. Acta Electronica Sinica, 1995, (10).
[1]王跃林,苏以撒,王文.微电子机械系统[J].电子学报,1995(10):37-42. DOI：

Wang Yaolin. The Microelectromechanical Systems[J]. Acta Electronica Sinica, 1995, (10). DOI：

摘要

本文对国外微电子机械系统（ＭＥＭＳ）的研究现况作了评述。介绍了ＭＥＭＳ的主要技术和它的应用情况，对国外的一些主要研究机构的情况进行了分析，最后就我国ＭＥＭＳ的发展提出了一些建议。

Abstract

A survey of current international research on MEMS is presented. The principal technology involved in MEMS and its industrial application are introduced. We have also analyzed MEMS related research conducted by leading international institutes and some suggestions are proposed for future development of MEMS technology in China.

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