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东南大学微电子中心
Published:1995
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[1]黄庆安.真空微电子学的研究与发展[J].电子学报,1995(10):134-138+133.
Huang Qiangan. Research and Development of Vacuum Microelectronics[J]. Acta Electronica Sinica, 1995, (10).
[1]黄庆安.真空微电子学的研究与发展[J].电子学报,1995(10):134-138+133. DOI:
Huang Qiangan. Research and Development of Vacuum Microelectronics[J]. Acta Electronica Sinica, 1995, (10). DOI:
本文系统介绍了近年来真空微电子学的研究内容、达到的水平和亟待解决的问题:包括真空微电子器件的基本结构、场发射阵列、微尖结构物理、新材料和新器件的探索以及真空微电子学的主要应用。
The research fields
current level and problems of vacuum microelectronics are presented
including basic structures of vacuum microdevices
field emission array
physics of microtip
new materials
new principles of vacuum microelectronics and main applications.
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