Investigation of Surface Physical Sorption and Characteristic of Quartz Crystal Humidity Sensor

董永贵; 冯冠平

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Investigation of Surface Physical Sorption and Characteristic of Quartz Crystal Humidity Sensor

更新时间：2025-12-08

- Investigation of Surface Physical Sorption and Characteristic of Quartz Crystal Humidity Sensor
- Acta Electronica Sinica Issue 5, (1995)
- 作者机构：
  
  清华大学精密仪器与机械学系
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN752.2
- Published：1995
- 稿件说明：
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[1]董永贵,冯冠平.表面物理性吸附与石英晶体湿度传感器性能的研究[J].电子学报,1995(05):94-96.

董永贵, 冯冠平. Investigation of Surface Physical Sorption and Characteristic of Quartz Crystal Humidity Sensor[J]. Acta Electronica Sinica, 1995, (5).
[1]董永贵,冯冠平.表面物理性吸附与石英晶体湿度传感器性能的研究[J].电子学报,1995(05):94-96. DOI：

董永贵, 冯冠平. Investigation of Surface Physical Sorption and Characteristic of Quartz Crystal Humidity Sensor[J]. Acta Electronica Sinica, 1995, (5). DOI：

摘要

本文针对带有吸湿性涂层的石英晶体谐振器的研究，提出了一种三层结构的力学模型，并在此基础上导出了谐振器频偏量与表面吸附量间的关系公式。实验证明该公式更好地反映了表面吸附与湿敏特性的关系。对于其它石英晶体谐振式气敏及离子敏传感器，该公式也具有相当的实用意义。

Abstract

A three-layer mechanical model is presented for a quartz crystal humidity sensor and a formula is deduced for calculating the relationship between surface sorption and frequency shift of a coated quartz crystal resonator. Experiments have proved that this formula is more identical with experimental results than G. Sauerbrey’s formula

and it can also be applied to other quartz crystal gas or ion sensors.

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