Application of Microwave Resonator Probe to Measurement Plasma Density

曹金祥; 徐宏亮; 俞昌旋; 曾磊; 赵红波; 丁卫星; 许炳; 沈海根; 金凯

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Application of Microwave Resonator Probe to Measurement Plasma Density

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- Application of Microwave Resonator Probe to Measurement Plasma Density
- Acta Electronica Sinica Issue 6, (1995)
- 作者机构：
  
  中国科学技术大学
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH834
- Published：1995
- 稿件说明：
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[1]曹金祥,徐宏亮,俞昌旋,曾磊,赵红波,丁卫星,许炳,沈海根,金凯.微波共振探针在测量等离子体密度中的应用[J].电子学报,1995(06):88-90.

曹金祥, 徐宏亮, 俞昌旋, et al. Application of Microwave Resonator Probe to Measurement Plasma Density[J]. Acta Electronica Sinica, 1995, (6).
[1]曹金祥,徐宏亮,俞昌旋,曾磊,赵红波,丁卫星,许炳,沈海根,金凯.微波共振探针在测量等离子体密度中的应用[J].电子学报,1995(06):88-90. DOI：

曹金祥, 徐宏亮, 俞昌旋, et al. Application of Microwave Resonator Probe to Measurement Plasma Density[J]. Acta Electronica Sinica, 1995, (6). DOI：

摘要

本文介绍了一种可以测量局部等离子体电子密度的微波共振探针法，并给出了它的测量原理、设计方法和实验结果。实验结果表明：由于微波共振探针不受鞘层的影响，因此它比通常的朗谬静电探针对等离子体密度的测量要精确得多。微波共振探针的空间分辨率与它的几何尺寸有关。

Abstract

A microwave resonator probe method for diagnosing local plasma electron density is described

and the measurement principle

design method and experiment results are included. The experimental results show that the microwave resonator probe is much more reliable than Langmuir probe in the measurement of plasma density due to its completeness. The spatial resolution depends upon the size of microwave resonator probe.

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Related Institution

Department of Modern Physics,University of Science & Technology of China,Hefei 230026) Zhang Jiaxiang

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