In Situ Formation of YBaCuO Superconducting Film by Long-Pulse Laser Deposition

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- In Situ Formation of YBaCuO Superconducting Film by Long-Pulse Laser Deposition
- Acta Electronica Sinica Issue 8, Pages: 80-82(1992)
- 作者机构：
  
  1. 北京真空电子技术研究所
  2. 北京真空电子技术研究所北京 100016
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：1992
- 稿件说明：
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[1]张甫权,李庠,潘萍,薛瑞君.长脉冲激光沉积原位生成YBaCuO超导膜[J].电子学报,1992(08):80-82.

Zhang Fuquan, Li Xiang, Pan Ping, et al. In Situ Formation of YBaCuO Superconducting Film by Long-Pulse Laser Deposition[J]. Acta Electronica Sinica, 1992, (8): 80-82.
[1]张甫权,李庠,潘萍,薛瑞君.长脉冲激光沉积原位生成YBaCuO超导膜[J].电子学报,1992(08):80-82. DOI：

Zhang Fuquan, Li Xiang, Pan Ping, et al. In Situ Formation of YBaCuO Superconducting Film by Long-Pulse Laser Deposition[J]. Acta Electronica Sinica, 1992, (8): 80-82. DOI：

用长脉冲激光（脉冲宽度150μs

波长1.06μm）辐照高温烧结的YBa

7-x

靶

在6Pa的氧气压强下

巳在（100）YSZ单晶衬底上原位生成YBa

7-x

超导膜。衬底置于750℃的加热器上

衬底与靶之间的距离5cm

用该法制得的薄膜光亮坚实

正常态呈金属性

零电阻温度为84.7K。用XRD和SEM对薄膜进行了分析研究。

In situ formation of YBa2Cu3O7

superconducting film on （100） YSZ single crystalline substrates by long-pulse laser （150μs

l.06μm） beam shooting at the YBa2Cu3O7-x target has been demo-nstrated. The temperature of substrate heater is 750℃. During deposition

the oxygen pressure in vacuum chamber is about 6 Pa. The thin films prepared by this technique are shiny and strong

and its zeroresi-stance temperature is 84.7K. These films have been analyzed by x-ray diffractometry and scanning elect-ron microscopy.

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