The Effect of Particle Size on Pb2(Tax, Ru2-x)O6+δ in Ru-Based Thick Film Resistor

Ju Xin.Shi Chaoshu.Tang Xiaowei

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The Effect of Particle Size on Pb₂(Ta_x, Ru_2-x)O₆₊δ in Ru-Based Thick Film Resistor

更新时间：2025-12-08

- The Effect of Particle Size on Pb₂(Ta_x, Ru_2-x)O₆₊δ in Ru-Based Thick Film Resistor
- Acta Electronica Sinica Issue 5, Pages: 96-98(1993)
- 作者机构：
  
  1.   中国科学技术大学
  2.   华东微电子究研所
  3.   中国科学技术大学合肥 230026
  4.   合肥 230031
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：1993
- 稿件说明：
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[1]巨新,杨建红,施朝淑,唐孝威.钉基厚膜电阻中钽钌酸铅颗粒尺寸效应的研究[J].电子学报,1993(05):96-98.

Ju Xin.Shi Chaoshu.Tang Xiaowei. The Effect of Particle Size on Pb₂(Ta_x, Ru_2-x)O₆₊δ in Ru-Based Thick Film Resistor[J]. Acta Electronica Sinica, 1993, (5): 96-98.
[1]巨新,杨建红,施朝淑,唐孝威.钉基厚膜电阻中钽钌酸铅颗粒尺寸效应的研究[J].电子学报,1993(05):96-98. DOI：

Ju Xin.Shi Chaoshu.Tang Xiaowei. The Effect of Particle Size on Pb₂(Ta_x, Ru_2-x)O₆₊δ in Ru-Based Thick Film Resistor[J]. Acta Electronica Sinica, 1993, (5): 96-98. DOI：

摘要

本文研究了钌基厚膜电阻导电相图钌酸铅(Pb

(Ta

2-x

+σ)（δ=0.1）颗粒尺寸对其阻值和电阻温度系数（TCR）的影响。发现适当控制颗粒度大小

可获得具有稳定阻值和TCR的厚膜电阻。

Abstract

The effect of the particle size of Pb2（Tax

Ru2-x）O6+δ conductive phase contained in Ru-based thick film resistor on resistance and temperature coefficie t of resistance（TCR） has been studied. It is found that thick film resistor with stable resistance and TCR can be obtained by appropriately controlling the size of the conductive particle.

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