Buried Channel Transverse-Voltage Type Piezoresistive IC Pressure Transducer

Jin Qi; Bao Min-hang; Wang Yan Zhou Hao

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Buried Channel Transverse-Voltage Type Piezoresistive IC Pressure Transducer

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- Buried Channel Transverse-Voltage Type Piezoresistive IC Pressure Transducer
- Acta Electronica Sinica Issue 2, Pages: 34-38(1991)
- 作者机构：
  
  复旦大学电子工程系
- 作者简介：
- 基金信息：
- DOI：
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- Published：1991
- 稿件说明：
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[1]晋琦,鲍敏杭,王言,周昊.埋沟式横向电压型集成压力传感器[J].电子学报,1991(02):34-38.

Jin Qi, Bao Min-hang, Wang Yan Zhou Hao. Buried Channel Transverse-Voltage Type Piezoresistive IC Pressure Transducer[J]. Acta Electronica Sinica, 1991, (2): 34-38.
[1]晋琦,鲍敏杭,王言,周昊.埋沟式横向电压型集成压力传感器[J].电子学报,1991(02):34-38. DOI：

Jin Qi, Bao Min-hang, Wang Yan Zhou Hao. Buried Channel Transverse-Voltage Type Piezoresistive IC Pressure Transducer[J]. Acta Electronica Sinica, 1991, (2): 34-38. DOI：

摘要

本文提出一种低功耗埋沟式横向电压型集成压力传感器结构

并根据精确的工艺模型成功地进行了工艺计算机模拟程序和制作。实验表明

该器件可以在低功耗条件下具有很高的灵敏度和可靠的稳定性。

Abstract

This paper reports a buried channel structure for low power transverse voltage type IC pressure transducer. The fabrication and process computer simulation has been completed successfully. The experimental results showed that this sensor has more advantages than previous devices in sensitivity and stability under the condition of much lower power consumption.

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