An ion chromatographic method for determination of trace quantoty of anions in electronic grade water

high purity gases

e. g. N2

H2

O2

Ar and He; special gases

e. g. SiH4

PH3

CO2

HC1 and CH4; various kinds of resins

plastics

reverse osmosis membranes and ultrafiltration membranes has been proposed. The detection limit is 0.1

0.05

0.5. 0.5

and 0.1 ppb for F-

Cl-

NO3-

HPO42- and SO42-

respectively.In this study the anion analytical method with detection limit lower than 0.5 ppb without using concentration coloum is reported for the first time.A rapid

reliable and accurate ion chromatographic method has been established and adopted as a National arbitration method for Electronic grade water standard.