A SDS-2 Multilunction Electron Beam Scanning System

An De-xiang; Yin Ming

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A SDS-2 Multilunction Electron Beam Scanning System

更新时间：2025-12-08

- A SDS-2 Multilunction Electron Beam Scanning System
- Acta Electronica Sinica Issue 3, Pages: 27-30(1987)
- 作者机构：
  
  山东工业大学电机系
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：1987
- 稿件说明：
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[1]安德祥,尹明.SDS-2多功能电子束扫描系统[J].电子学报,1987(03):27-30.

An De-xiang, Yin Ming. A SDS-2 Multilunction Electron Beam Scanning System[J]. Acta Electronica Sinica, 1987, (3): 27-30.
[1]安德祥,尹明.SDS-2多功能电子束扫描系统[J].电子学报,1987(03):27-30. DOI：

An De-xiang, Yin Ming. A SDS-2 Multilunction Electron Beam Scanning System[J]. Acta Electronica Sinica, 1987, (3): 27-30. DOI：

摘要

作者采用模拟与数字相结合的扫描方法

以三角波取代文献[8]中的锯齿波

减小了对偏转放大器高频响应的要求。模拟扫描速度为1mV～100mV/μS;每轴向地址分辨率为15bit;扫描场尺寸、旋转和正交性等都可自动调节。于20×20mm

扫描场曝光得到2μm平滑斜线。

Abstract

This paper describes a SDS-2 multifunction e-beam scanning system in which the combination of analog and digit scanning is used. The triangular wave instead of the sawtooth wave is used to reduce the requirement of the high frequency response of the deflection amplifier. The analogous scanning speed is 1mV

00mV/μs

and the address resolution is 15 bit per axis. All the scanning field adjustments are automatic. Experimental exposure has been practised in the 20×20mm2 scanning field with smooth skewed vector at 2μm.

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