A Microcomputer Control System for Epitaxial Reactor

Liang Ren-qiu; Huang Sheng-jun

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A Microcomputer Control System for Epitaxial Reactor

更新时间：2025-12-08

- A Microcomputer Control System for Epitaxial Reactor
- Acta Electronica Sinica Issue 3, Pages: 19-24(1986)
- 作者机构：
  
  清华大学
- 作者简介：
- 基金信息：
- DOI：
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- Published：1986
- 稿件说明：
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[1]梁任秋,黄胜军.气相外延单板机直接数字控制系统[J].电子学报,1986(03):19-24.

Liang Ren-qiu, Huang Sheng-jun. A Microcomputer Control System for Epitaxial Reactor[J]. Acta Electronica Sinica, 1986, (3): 19-24.
[1]梁任秋,黄胜军.气相外延单板机直接数字控制系统[J].电子学报,1986(03):19-24. DOI：

Liang Ren-qiu, Huang Sheng-jun. A Microcomputer Control System for Epitaxial Reactor[J]. Acta Electronica Sinica, 1986, (3): 19-24. DOI：

摘要

本文论述了气相外延炉单板机直接数字控制系统的组成和性能

对象数学模型的建立和两种数字控制器的设计方法

以及本系统的控制软件和操作过程。该系统已在生产线上运行

情况良好。

Abstract

A single board computer control system for vapor epitaxial reactor is described

followed by a discussion of the structure and performance of the system. The mathematical model of the process and two design methods of the digital controller are given. A brief account of the control software development and the operation of this system is also introduced. The system has worked well on a production line in Beijing.

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