Study on Process controllability for h<sub>FE</sub> and BV<sub>ceo</sub>of Bipolar Transistor

He Wui-hua

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Study on Process controllability for h_FE and BV_ceoof Bipolar Transistor

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- Study on Process controllability for h_FE and BV_ceoof Bipolar Transistor
- Acta Electronica Sinica Issue 6, Pages: 89-93(1987)
- 作者机构：
  
  北京市半导体器件研究所
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：1987
- 稿件说明：
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[1]何维华.双极晶体管hFE和BV_(ceo)工艺可控性的研究[J].电子学报,1987(06):89-93.

He Wui-hua. Study on Process controllability for h_FE and BV_ceoof Bipolar Transistor[J]. Acta Electronica Sinica, 1987, (6): 89-93.
[1]何维华.双极晶体管hFE和BV_(ceo)工艺可控性的研究[J].电子学报,1987(06):89-93. DOI：

He Wui-hua. Study on Process controllability for h_FE and BV_ceoof Bipolar Transistor[J]. Acta Electronica Sinica, 1987, (6): 89-93. DOI：

摘要

本文对双极晶体管制作中如何有效地控制好h

和BV

c60

的条件作了较详细的工艺实验

并导出其必要条件为Δσ

°≥Δσ

然后通过扩散规律及器件结构功能的分析

探讨提高h

和BV

c60

工艺可控性的工艺方法与控制途径。

Abstract

In this paper

more detailed technological experiments are discussed for determining conditions under which hFB and BVcao can be effectively controlled during fabrication of bipolar transistor

and it is deduced that the prerequisite is △σi>>△σi Then the processing methods and controlling ways for improving process controllability of hFE and BVcao are searched through the analysis o( the diffusion law and functions of the device construction.

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Study on Process controllability for hFE and BVceoof Bipolar Transistor

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摘要

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Study on Process controllability for h_FE and BV_ceoof Bipolar Transistor