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上海复旦大学
Published:1985
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[1]吴宪平,鲍敏杭.单块集成压阻式压力传感器[J].电子学报,1985(05):39-44.
Wu Xian-pin, Bao Min-hang. A Monolithic Integrated Piezoresistive Pressure Transducer[J]. Acta Electronica Sinica, 1985, (5): 39-44.
本文介绍一种由力敏电阻全桥和温度补偿的放大器电路构成的集成压力传感器。通过理论分析得到了(100)矩形硅膜的尺寸以及力敏电阻位置和尺寸的最佳化设计。通过对全电路温度系数的分析计算
找到了最佳的工作条件。该设计已由双极集成电路工艺和各向异性化学腐蚀工艺实现
制成了灵敏度达到1000μV/mmHg的集成压力传感器
并已用于生理压力的实际测试。
An integrated circuit pressure transducer consisting of a full bridge of piezo-resistors with a novel design and an amplifier with temperature compensation is described. The configuration and dimension of the (100) rectangular Si diaphragm as well as the locations and the dimensions of the resistors are optimized through careful computation. The temperature coefficient of the whole circuit is analysed and minimized. The design has been implemented by conventional bipolar IC technology and anisotropic chemical etching. The transducers fabricated show a sensitivity of about 1000 μV/mmHg and have been used for physiological pressure measurement in clinical applications.
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