Wang Yin-yue, Zhang Fang-qing, Wu Xian-cbeng, et al. Study of Field Effect under Illumination for GD-a-SixC1-x:H Films[J]. Acta Electronica Sinica, 1987, (1): 124-126.
Wang Yin-yue, Zhang Fang-qing, Wu Xian-cbeng, et al. Study of Field Effect under Illumination for GD-a-SixC1-x:H Films[J]. Acta Electronica Sinica, 1987, (1): 124-126.DOI:
Study of Field Effect under Illumination for GD-a-SixC1-x:H Films
摘要
本文利用MOSFET结构研究了GD-a-Si
x
C
1-x
:H薄膜的光照场效应以及光电导和S-W效应。实验测得光照引入的缺陷态密度约为10
17
/cm
3
.eV。
Abstract
The field effect of GD-a-Six C1-x:H films under illumination and photoconduction as we ll as the S-W effect are studied using the MOSFET structure. The measurement results show that the density of states due to illumination is about 1017/cm2·eV.