The Calculation of Third-Order Aberrations of Electrostatic Lenses by Non-Paraxial Electron Trajectories

Yan Ji-wen; Chen Wen-xiong; Zhu Qing

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The Calculation of Third-Order Aberrations of Electrostatic Lenses by Non-Paraxial Electron Trajectories

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- The Calculation of Third-Order Aberrations of Electrostatic Lenses by Non-Paraxial Electron Trajectories
- Acta Electronica Sinica Issue 1, Pages: 47-53(1984)
- 作者机构：
  
  北京大学无线电系
- 作者简介：
- 基金信息：
- DOI：
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- Published：1984
- 稿件说明：
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[1]晏继文,陈文雄,朱青.用非傍轴轨迹直接计算静电电子透镜的三级象差系数[J].电子学报,1984(01):47-53.

Yan Ji-wen, Chen Wen-xiong, Zhu Qing. The Calculation of Third-Order Aberrations of Electrostatic Lenses by Non-Paraxial Electron Trajectories[J]. Acta Electronica Sinica, 1984, (1): 47-53.
[1]晏继文,陈文雄,朱青.用非傍轴轨迹直接计算静电电子透镜的三级象差系数[J].电子学报,1984(01):47-53. DOI：

Yan Ji-wen, Chen Wen-xiong, Zhu Qing. The Calculation of Third-Order Aberrations of Electrostatic Lenses by Non-Paraxial Electron Trajectories[J]. Acta Electronica Sinica, 1984, (1): 47-53. DOI：

摘要

本文用非傍轴电子轨迹直接计算双圆筒透镜的球差

认为在超出三级区的条件下须考虑高于三级的象差

在三级区中运用轨迹法

可以求得全部的三级象差系数。文中得到的双圆筒透镜的三级渐近球差系数和公式法算得的相差不到5％。

Abstract

Calculation of the aberration coefficients Mij and Fij has been carried out for the equidiameter coaxial double cylinder electrostatic lens by non-paraxial electron trajectories. Using the values of Fij

the 3rd order asymptotic spherical aberration coefficients are calculated with a disagreement less than 5% in comparison with that of spherical aberration coefficient integral.

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