500 MHz Quartz Crystal Resonators

Lei Zhen-huan; Chi Hong-guang; Wang Yi-hua

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500 MHz Quartz Crystal Resonators

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- 500 MHz Quartz Crystal Resonators
- Acta Electronica Sinica Issue 4, Pages: 104-105(1984)
- 作者机构：
  
  1. 山东大学物理系
  2. 山东大学物理系济南
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：1984
- 稿件说明：
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[1]雷震寰,迟洪广,王宜华.应用离子束刻蚀技术提高石英谐振器基频的实验研究[J].电子学报,1984(04):104-105.

Lei Zhen-huan, Chi Hong-guang, Wang Yi-hua. 500 MHz Quartz Crystal Resonators[J]. Acta Electronica Sinica, 1984, (4): 104-105.
[1]雷震寰,迟洪广,王宜华.应用离子束刻蚀技术提高石英谐振器基频的实验研究[J].电子学报,1984(04):104-105. DOI：

Lei Zhen-huan, Chi Hong-guang, Wang Yi-hua. 500 MHz Quartz Crystal Resonators[J]. Acta Electronica Sinica, 1984, (4): 104-105. DOI：

摘要

针对离子束刻蚀对石英晶体造成损伤的主因

采取合适的刻蚀工艺和减轻晶片损伤的措施

可使石英谐振器的性能获得显著改善。本文报道了使这类谐振器基频达456MHz的实验制作结果。

Abstract

The quartz crystal damages due to ion beam milling is analysed and suitable milling conditions and some damage-reduction measures are proposed. As a result

the UHF resonaors have low equivalent resistance

high Q value

fine frequency response and usable mechanical property.

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