Pulse Width and Output Power of Excimer Laser

Lei Shi-zhan; Zhao Mei-cun; Zhou Zhong-yi.

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Pulse Width and Output Power of Excimer Laser

更新时间：2025-12-08

- Pulse Width and Output Power of Excimer Laser
- Acta Electronica Sinica Issue 5, Pages: 83-85(1982)
- 作者机构：
  
  中国科学院上海光机所
- 作者简介：
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- DOI：
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- Published：1982
- 稿件说明：
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[1]雷仕湛,赵梅村,周忠益.准分子激光器的光脉冲宽度和输出功率[J].电子学报,1982(05):83-85.

Lei Shi-zhan, Zhao Mei-cun, Zhou Zhong-yi.. Pulse Width and Output Power of Excimer Laser[J]. Acta Electronica Sinica, 1982, (5): 83-85.
[1]雷仕湛,赵梅村,周忠益.准分子激光器的光脉冲宽度和输出功率[J].电子学报,1982(05):83-85. DOI：

Lei Shi-zhan, Zhao Mei-cun, Zhou Zhong-yi.. Pulse Width and Output Power of Excimer Laser[J]. Acta Electronica Sinica, 1982, (5): 83-85. DOI：

摘要

基于形成准分子的动力学过程

利用联合求解粒子数、光子密度速率方程和电路方程

求得快放电准分子激光器的脉冲宽度、输出功率与有关放电参数之间的关系

并与实验结果作了对比。

Abstract

Based on the kinetic process of excimer formation and using simultaneous solution of the rate equation ior population density and photon density and the equation for discharge circuit

the relationship between the pulse width and output in a fast-discharge excimer laser on the one hand and the discharge parameters on the other hand is obtained.The computed results are essentially in agreement with the experiments.

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